Small Industrial Atmosphere Furnace For Semiconductors Drying Curing Degreasing
Product Specifications
| Attribute | Value |
| Range of Applications | Industrial |
| Type | Electric Holding Furnace |
| Usage | Drying, Curing, Degreasing |
| Fuel | Electric |
| Atmosphere | Air |
| Effective Chamber Dimensions | 600×500×600mm (W×D×H) |
| Transport Package | Wooden Packaging |
| Overall Dimensions | 1110×1050×1820mm (W×H×D) |
| Trademark | Chitherm |
| Origin | China |
| Certification | ISO |
| Place Style | Vertical |
Product Overview
The HRF180-05 Rapid Annealing Furnace is designed for precision drying, curing, and degreasing processes in semiconductor and electronic component manufacturing. Featuring advanced temperature control and uniform heat distribution, this industrial furnace ensures consistent results for critical material processing.
Key Features
- Specially designed cage-type heating element for efficient heat transfer
- Centrifugal fan system for optimal air circulation
- Double-layer stainless steel construction with full fiber insulation
- Imported intelligent temperature controller with PID auto-tuning
- Comprehensive safety alarms and protection systems
Technical Specifications
| Model | HRF180-05 |
| Operating Temperature Range | RT~400°C |
| Maximum Temperature | 450°C |
| Temperature Uniformity | Better than ±5°C |
| No-load Heating Rate | ≤5°C/min |
| Maximum Heating Power | 12kW |
| Power Supply | Three-phase, 380VAC, 50Hz |
| Surface Temperature Rise | ≤35°C |
Standard Delivery Contents
| Item | Note | Quantity |
| Basic Components | Furnace | 1 unit |
| Inspection Certificate | Certificate of major outsourced components | 1 set |
| Technical Documents | Instructions, technical documents | 1 set |
| Key Components | Heating Element | 1 set |
| Temperature Controller | | 1 set |
| Circulation Fan | | 1 set |
| Spare Parts | SSR | 1 pc |
| Heating Wire | | 1 pc |
Installation Requirements
- Environmental Conditions: Temperature 0 to 40°C, humidity ≤80% RH, no corrosive gases
- Ventilation System: Extraction capacity >5 m³/h
- Floor Requirements: Level surface, load-bearing >200 Kg/m²
- Power Requirements: >16 kVA, 3-phase 5-wire, 220/380V, 50Hz
- Installation Space: Minimum 2000×1800×3000mm (W×D×H)